Modeling and Performance Evaluation for Automated Material Handling Systems in a 300mm Foundry Fab
نویسندگان
چکیده
Modeling and Performance Evaluation for Automated Material Handling Systems in a 300" Foundry Fab Han-Pang Huang*, Chun-Tsong Wag* * Robotics Laboratory, Department of Mechanical Engineering National Taiwan University, Taipei, 10674 Taiwan Email: [email protected] TELEAX: (+886-2) 2363-3875 * Professor and correspondence addressee **Graduate student Abstract In this paper, a modeling methodology for conceptual design of automated material handling system using distributed colored timed Petri net (DCTPN) will be developed. The IC fabrication process-flow model is constructed and integrated with AMHS models. Especially, in IC fabrication process-flow modeling, a method called virtual tool group will be proposed to solve the problem in modeling tool-coupling effects. From this entire fab model, several performance indexes, such as WIP, bottleneck detection, cycle time, wafer operation history tracking, and vehicle utilization can be evaluated from DCTPN simulation result.
منابع مشابه
Automated Reticle Handling: a Comparison of Distributed and Centralized Reticle Storage and Transport
The implementation of Automated Material Handling Systems (AMHS) in 300mm semiconductor facilities provides the opportunity to realize significant benefits in fabricator productivity and performance. The leverage associated with automated reticle delivery to photolithography process tools may be less apparent than a fab-wide AMHS. However, a high product mix environment requires the tracking, s...
متن کاملA Simulation-based Design Framework for Automated Material Handling Systems in 300mm Fabrication Facilities
This paper describes a methodology to tackle the problem of designing Automated Material Handling Systems (AMHS) for 300mm wafer fabrication facilities. The proposed framework divides the design process into two levels: architectural and elaborative. Prior to the design, fab data are preprocessed using simulation of manufacturing operations. The output data and fab requirements data are then pr...
متن کاملVehicle Clustering Phenomenon in Automatic Materials Handling Systems in 300mm Semiconductor Manufacturing
During design and implementation of the automatic materials handling system (AMHS) for a local 300mm semiconductor wafer fab (semiconductor fabrication plant), we observed and found an interesting phenomenon Vehicle Clustering Phenomenon (VCP) from the dynamics of automated vehicles: As time evolves, the distance between any two adjacent vehicles usually becomes very close enough as if all the ...
متن کاملPerformance evaluation of an automated material handling system for a wafer fab
Discrete-event simulation model was developed to evaluate the performance of an automated material handling system (AMHS) for a wafer fab with a zone control scheme avoiding all vehicle collision. The layout of this AMHS is a custom configuration. The track option contains turntables, turnouts and high-speed express lanes. The behavior of the interarrival for all stockers from the real data set...
متن کاملHigh-fidelity rapid prototyping of 300 mm fabs through discrete event system modeling
Traditionally, the semiconductor manufacturing industry has been driven by continuous technological advancement of the underlying production processes. Yet, as the industry matures, mere technology development is no longer sufficient. The effective deployment and exploitation of the system production capacity and operational capability become critical for competitive success. Hence, currently, ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 2002